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Chad B. O'Neal, Ph.D., P.E.

Max Watson Sr. Endowed Professor of Mechanical Engineering
IfM Research Faculty Member

Assistant Professor, Graduate Studies Coordinator,

Mechanical Engineering, Nanosystems Engineering

Welcome! 

This webpage briefly describes myself, my group members, our  research objectives, and academic course information.  Our group focuses on novel devices and processes that utilize silicon, piezoelectric and micro/nanofabrication techniques such as MEMS/NEMS (surface and bulk micromachining), thin film deposition and patterning, and wafer-level bonding and wafer-scale packaging.  We are trying to develop advanced sensors and actuators for commercial, military, and other applications.

We can also do custom wafer alignment and bonding for your application from traditional anodic and direct fusion bonding to advanced bonding processes such as multi-wafer stacks, novel materials, and low level protoyping and production on 4" or 6" substrates. Please contact me for details.

Please feel free to contact me if you have interests in any of the topics listed in this website.

 

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To Contact me:

Chad B. O'Neal, Ph.D., P.E.

Institute for Micromanufacturing

911 Hergot Ave.

PO Box 10137

Louisiana Tech University

Phone: 318-257-5122

Fax: 318-257-5104

E-mail:  coneal@latech.edu

http://www.latech.edu/~coneal